Holon Co., Ltd. Development, manufacturing, and marketing of semiconductor inspection tools and overall maintenance services

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Roll-SEM (Roller mold measurement tool)

Roll-SEM

Roll-SEM is the only e-beam measurement tool in the market enabling observation and measurement of Nanoimprint roller molds without any special preparation or treatment to specimen. It provides the only powerful solution for inspecting “seamless” nano-patterns on roller molds.

  • Direct observation and measurement of roller molds
  • Non-destructive inspection of specimen without gold deposition
  • Rolling mold stage adopted.
  • Specificatons tailored to customer's requirements (ex. mold size, etc.)
基本仕様
Roll-SEMイメージ

 

Roll-SEMイメージ