Holon Co., Ltd. Development, manufacturing, and marketing of semiconductor inspection tools and overall maintenance services

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EBLITHO™ (EB-Stamper)

EBLITHO™

  • EB-Stamper, “EBLITHO” suitable for mass production of nano-patterns, enabling noncontact printing of the complete photoperiod structure onto the Epi-substrate.
  • Use of a stencil mask enhancing the high throughput, thus, leading to the lower CoO (Cost of Ownership).
  • Small features printable onto a large area mold (10mm area) for nanoimprint lithography in 10 seconds.
  • Compatible with 2" ~ 6" substrates

EB-Stamper EBLITHOイメージ